HIGH-PURITY TITANIUM TUNGSTEN SPUTTERING TARGETS FOR ADVANCED THIN FILMS


Ti Sputtering for Advanced Thin Film Deposition

Sputtering is a widespread technique utilized in the fabrication of advanced thin films. Titanium (Ti) sputtering, namely, has emerged as a preferred method due to its tungsten sputter target ability to deposit high-quality Ti thin films with accurate thickness and composition. The process involves bombarding a Ti target with energetic ions, libera

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